Low temperature epitaxial growth of ZnO layer by plasma-assisted epitaxy

Plasma-assisted epitaxial growth of ZnO layers were achieved on C- and R-plane sapphire substrates in oxygen plasma excited by radio frequency power at 13.56 MHz with evaporation of pure elemental Zn. The ZnO layers were grown at 300–400°C with high growth rate around 1.7 μm/h. Surface cleaning of sapphire substrates using Ar-plasma was crucial for good quality ZnO growth. Photoluminescence spectra at 10 K were dominated by band-edge emission due to bound excitons without deep level emission in green-light region. The intensity of band-edge emission was strongly dependent on applied radio frequency power to excite Ar- and O₂-plasma for sapphire surface cleaning and ZnO growth, respectively, and was about 50 times larger on the layer grown in oxygen plasma than that grown in non-excited oxygen gas. The ZnO layer grown on R-plane sapphire was epitaxially grown above 300°C in oxygen plasma, however, on C-plane sapphire the ZnO layer was easily polycrystallized for thick films even at 400°C. Growth mode and surface morphology of ZnO layers were drastically changed with the substrate orientation.