Formation of β-Si3N4 Coatings by Chemical Vapor Deposition

BetaSi₃N₄ coatings were obtained by chemical vapor deposition in a fused-silica reaction tube by outside heating of the system SiCl₄-NH₃-N₂ at a deposition temperature (reaction tube temperature) of 1300°C, whereas α- and α+β-phase coatings were obtained at depositon temperatures of 1150° and 1250°C, respecively. Formation of β-phase coatings at relatively low temperatures is explained in terms of the effect of a catalytic impurity, SiO vapor from the reaction tube. The X-ray diffraction patterns and sulface morphologies of the coatings were studied.