| 横向剪切—外差干涉测量方法 |
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| 引用本文： | 任新 张爱红. 横向剪切—外差干涉测量方法[J]. 哈尔滨工业大学学报, 1993, 25(5): 107-112 |
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| 作者姓名： | 任新 张爱红 |
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| 作者单位： | 哈尔滨工业大学航天工程与力学系，哈尔滨工业大学航天工程与力学系，哈尔滨工业大学航天工程与力学系，哈尔滨工业大学航天工程与力学系 工程师 |
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| 摘 要： | 阐述了一种新颖的横向剪切－外差干涉有测量方法，这种方法集横向剪切干涉测量方法与外差测量方法于一体，使二者的优点得以发扬。由于取消了参考基准面，采用外差探测，干涉条纹的判读不仅容易，而且精度高，为大口径高精度平面的测量提供了一种可行的测量方法。
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| 关 键 词： | 横向剪切 干涉仪 外差干涉测量 |
The Measuring Method of Crossed Shearing-Heterodyne Interference |
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| Ren Xin Zhang Aihong Zhang Yang Ren Weiming. The Measuring Method of Crossed Shearing-Heterodyne Interference[J]. Journal of Harbin Institute of Technology, 1993, 25(5): 107-112 |
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| Authors: | Ren Xin Zhang Aihong Zhang Yang Ren Weiming |
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| Affiliation: | Dept.of Astronautics and Mechanics |
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| Abstract: | This paper expresses a novel measuring method of crossed shearing-heterodyne interference which combines crossed shearing with heterodyne measuring method and makes both of the advantages of two methods developed.Be-cause the method cancels the surface of reference and adopts heterodyne detection,it isnot only easy to distinguish and read out interference stripes,but also high precise.Apracticable measuring method is provided by which large and high precise surface ismeasured. |
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| Keywords: | Crossed shearing interferometer heterodyne interferometric method phase difference |
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