Imaging of in- and out-of-plane vibrations in micromechanical resonator |
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Authors: | Holmgren O. Kokkonen K. Mattila T. Kaajakari V. Oja A. Kiihamaki J. Knuuttila J.V. Salomaa M.M. |
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Affiliation: | Mater. Phys. Lab., Helsinki Univ. of Technol.; |
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Abstract: | Vibrations in a micromechanical 13.1 MHz bulk acoustic mode silicon resonator have been imaged with a scanning Michelson laser interferometer. A novel detection scheme utilizing the Michelson interferometer is developed, which enables imaging the in-plane vibrations in addition to the out-of-plane component. The novel imaging technique is demonstrated by measuring the vibrations of the extensional and Lame modes in a square plate resonator |
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