Low-temperature deposited Titanium-doped zinc oxide thin films on the flexible PET substrate by DC magnetron sputtering |
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| Affiliation: | 1. Center of Super-Diamond and Advanced Films (COSDAF), and Department of Physics and Materials Science, City University of Hong Kong, Hong Kong SAR, China;2. Department of Electronic Engineering, The Chinese University of Hong Kong, Hong Kong SAR, China;3. School of Chemical & Biomedical Engineering, Nanyang Technological University, 62 Nanyang Drive, 637459, Singapore;1. School of Physics, Shandong University, Jinan 250100, PR China;2. Key Laboratory of Colloid and Interface Chemistry (Ministry of Education), Shandong University, Jinan 250100, PR China;3. School of Microelectronics, Shandong University, Jinan 250100, PR China;4. School of Physics and Electrical Engineering, Kashgar University, Kashgar 844000, PR China;1. Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China;2. Science and Technology on Power Beam Processes Laboratory, Beijing Aeronautical Manufacturing Technology Research Institute, Beijing 100024, China |
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| Abstract: | Transparent conducting Titanium-doped zinc oxide thin films (TZO) with high transparency and relatively low resistivity were firstly deposited on water-cooled polyethylene terephthalate (PET) substrates at room temperature by DC magnetron sputtering. The microstructure, optical and electrical properties of the deposited films were investigated and discussed. The XRD patterns show that all the deposited films are polycrystalline with a hexagonal structure and have a preferred orientation along the c-axis perpendicular to the substrate. The electrical resistivity decreases when the sputtering power increases from 45 W to 60 W. However, as the puttering power continue increases from 60 W to 90 W, the electrical resistivity increases rapidly. When the puttering power is 60 W, the films deposited on PET substrate have the lowest resistivity of 4.72 × 10?4 Ω cm and a relatively high transmittance of above 92% in the visible range. |
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