| 基于MEMS的微泵研究进展 |
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| 引用本文： | 王沫然,李志信. 基于MEMS的微泵研究进展[J]. 传感器与微系统, 2002, 21(6): 59-61 |
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| 作者姓名： | 王沫然 李志信 |
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| 作者单位： | 清华大学,工程力学系,北京,100084 |
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| 基金项目： | 国家重大自然科学基金项目(59995550-2 )，国家重点基础研究发展规划项目 (G19990 3 3 10 6) |
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| 摘 要： | 主要介绍了基于MEMS的微泵 10年来的研究成果和研究现状。微泵是微电子机械系统(MEMS)中重要的执行器件 ,在系统中占有很重要的地位。微泵可以分为有阀泵和无阀泵两大类 ,一般来说 ,有阀泵的制造工艺和应用技术比较成熟 ,但存在加工尺寸限制和使用寿命的问题 ;无阀泵的原理新颖 ,结构相对简单 ,更适合微型化发展 ,是目前研究的热点。
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| 关 键 词： | 微泵 微电子机械系统 有阀泵 无阀泵 |
| 文章编号： | 1000-9787(2002)06-0059-03 |
| 修稿时间： | 2002-01-16 |
Investigation process of micropump based on MEMS |
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| WANG Mo ran,LI Zhi xin. Investigation process of micropump based on MEMS[J]. Transducer and Microsystem Technology, 2002, 21(6): 59-61 |
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| Authors: | WANG Mo ran LI Zhi xin |
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| Abstract: | The research on the micropump in the past decade is reviewed.Micropump,as an important executive device of MEMS,plays a very important role in micro systems.They are divided into two types that are pumps with valves and those without them.In general,the manufacture and the application of the valved micropumps are ripe,however the size limitation of fabrication and the problem of short operating life have always been trouble.The valveless micropump is novel in mechanism,simple in structure,and suitable for micromation.And now it has been a hot research field. |
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| Keywords: | micropump MEMS valved micropump valveless micropump |
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