Study of Multilayer Thin Film Structures by Rutherford Backscattering Spectrometry |
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| Authors: | Bachurin V. I. Melesov N. S. Parshin E. O. Rudy A. S. Churilov A. B. |
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| Affiliation: | 1.K.A. Valiev Institute of Physics and Technology (Yaroslavl Branch), Russian Academy of Sciences, 150007, Yaroslavl, Russia
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| Abstract: | Technical Physics Letters - We have evaluated possibilities of using the method of Rutherford backscattering spectrometry (RBS) for depth profiling of multilayer thin-film structures containing... |
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