The Influence of a Flow of Low-Temperature Nitrogen Plasma on the Morphology,Electric Properties,and UV Photoconductivity of ZnO Films on Sapphire |
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Authors: | Gadzhiev M. Kh. Tyuftyaev A. S. Muslimov A. E. Kanevsky V. M. Ismailov A. M. Babaev V. A. |
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Affiliation: | 1.Joint Institute for High Temperatures, Russian Academy of Sciences, 125412, Moscow, Russia ;2.Shubnikov Institute of Crystallography, Federal Scientific Research Center Crystallography and Photonics,Russian Academy of Sciences, 119333, Moscow, Russia ;3.Dagestan State University, 367008 , Makhachkala, Dagestan, Russia ; |
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Abstract: | Technical Physics Letters - We have studied the influence of a flow of high-enthalpy nitrogen plasma generated by a dc plasmatron on the morphology, electrical properties, and UV photoconductivity... |
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