| 微机械热对流加速度传感器可靠性研究 |
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| 引用本文： | 杨拥军,吝海锋,师谦,徐爱东. 微机械热对流加速度传感器可靠性研究[J]. 微纳电子技术, 2003, 0(Z1) |
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| 作者姓名： | 杨拥军 吝海锋 师谦 徐爱东 |
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| 作者单位： | 中国电子科技集团公司第十三研究所 河北石家庄050051(杨拥军，吝海锋)，中国电子产品可靠性与环境实验研究所 广东广州510610(师谦)，中国电子科技集团公司第十三研究所 河北石家庄050051(徐爱东) |
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| 摘 要： | 介绍了一种新型的微机械加速度计———热对流加速度计的工作原理及加工制造工艺。由于加速度计由单晶硅腔体、加热器和两只在加热器两侧并与加热器等距的温度传感器构成 ,其本身没有活动部件 ,因此这种加速度计的抗冲击能力几乎达到材料本身的强度。本文通过实验的方法验证了这种加速度计能适应各种恶劣环境 ,为器件的实用化奠定了基础
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| 关 键 词： | 加速度计 热对流 可靠性 微机械 |
Research on reliability of the MEMS convective accelerometer |
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| YANG Yong jun ,LIN Hai feng ,SHI Qian ,XU Ai dong. Research on reliability of the MEMS convective accelerometer[J]. Micronanoelectronic Technology, 2003, 0(Z1) |
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| Authors: | YANG Yong jun LIN Hai feng SHI Qian XU Ai dong |
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| Affiliation: | YANG Yong jun 1,LIN Hai feng 1,SHI Qian 2,XU Ai dong 1 |
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| Abstract: | The working principle, fabrication technology for a new type of MEMS accelerometer , convective accelerometer are presented in this paper. As the accelerometer is composed of silicon cavity, heater, and temperature transducers which are fixed on both sides of the heater with equal distance, there are no moveable parts and no proof mass in the device, so ensured the anti shock property nearly perfect as the material property. The reliability experiment shows that the convective accelerometer can work well under abominable conditions. Such excellent property will make it reliable for products. |
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| Keywords: | accelerometer convective reliability MEMS |
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