| 多晶硅锭定向凝固过程的数值模拟 |
| |
| 引用本文： | 陈国红,王滋渊,肖益波,瞿海斌.多晶硅锭定向凝固过程的数值模拟[J].电子工业专用设备,2009,38(6):40-43,46. |
| |
| 作者姓名： | 陈国红 王滋渊 肖益波 瞿海斌 |
| |
| 作者单位： | 中国电子科技集团公司第四十八研究所,湖南,长沙,410111 |
| |
| 摘 要： | 研究了多晶硅锭定向凝固过程中晶体和熔体中的温度分布、固液界面的温度场，并对定向凝固过程进行了数值模拟，对热场对多晶硅晶体生长的影响进行了系统的理论分析和试验验证。
|
| 关 键 词： | 多晶硅锭 定向凝固过程 热场 数值模拟 |
Numerical Simulation of Directional Solidification Process for the Polycrystalline Silicon Ingot |
| |
| CHEN Guohong,WANG Ziyuan,XIAO Yibo,QU Haibin.Numerical Simulation of Directional Solidification Process for the Polycrystalline Silicon Ingot[J].Equipment for Electronic Products Marufacturing,2009,38(6):40-43,46. |
| |
| Authors: | CHEN Guohong WANG Ziyuan XIAO Yibo QU Haibin |
| |
| Affiliation: | (The 48th Research Institute of China Electronic Technology Group Company, Changsha 410111, China) |
| |
| Abstract: | In this paper, the temperature distribution of the crystal and melt for the polycrystalline sili- con ingot directional solidification process was discussed. And the temperature field of the solid-liquid interface was studied. The directional solidification process was visualized by the numerical simula- tion. A systematic theoretical analysis and experimental validation was provided for the effect about thermal field to polycrystalline silicon crystal growth. |
| |
| Keywords: | Polycrystalline silicon ingot Directional solidification process Thermal field Numerical simulation |
| 本文献已被 维普 万方数据 等数据库收录！ |
