基于内涨鼓泡实验的金刚石膜附着强度精确定量评价

根据内涨作用下薄膜发生鼓泡变形的原理，开发了1种新的适用于金刚石膜附着强度精确定量评价的测试系统。并在传统的硅平面加工工艺的基础上发展了1种新的在沉积好的基片上制备自支撑窗口试样的方法，该方法可以保证在刻蚀基底形成自支撑窗口的同时不会损坏到薄膜。通过实验，实现了对硅基底金刚石膜结合强度的定量检测，实验得到的薄膜结合强度为4．28726J／m^2。实验所测得的附着强度结果与有限元仿真结果类比的吻合，证实了该模型的有效性，从而为金刚石膜的制备工艺优化及其质量的评估提供了可靠的依据和标准，对促进金刚石膜材料的深度开发和工程应用将具有积极的意义。

Quantitative Evaluation of the Adhesive Strength of Diamond Thin Films by Bulge/Blister Test

On base of the principle of bulge/blister, special experimental equipment adapted for precise quantitative evaluation of the adhesive strength of diamond thin films was designed and fabricated, and free-standing windows sample of diamond thin film was fabricated by a new method developed on the base of conventional process technology of Si plane, which can ensure full diamond coatings from damage during the process of etching the free-standing windows. The average adhesion strength of diamond thin films calculated from the tests of the square membranes is 4.287 26 J/m2, which was coincident with simulation outcomes, so it was approved that the initial calculating model was validity. According to these test results, the adhesive strength could be obtained precisely and quantitatively by bulge/blister test, which can provide a basis for the optimization of diamond thin films fabrication technics and a criterion for the quality evaluation of diamond thin films, and the results will be beneficial to wide application of diamond thin films in the tool-engineering field.