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Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars
Authors:Yue‐Cun Wang  Lin Tian  Fan Liu  Yuan‐Bin Qin  Gong Zheng  Jing‐Tao Wang  Evan Ma  Zhi‐Wei Shan
Affiliation:1. Center for Advancing Materials Performance from the Nanoscale, State Key Laboratory for Mechanical Behavior of Materials, Xi'an Jiaotong University, Xi'an, P. R. China;2. School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, P. R. China;3. Engineering Research Center of Materials Behavior and Design, Ministry of Education, Nanjing University of Science and Technology, Nanjing, P. R. China;4. Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, MD, USA
Abstract:
Keywords:helium ion microscopes  helium ions dosage  mechanical behaviors  silicon micropillars
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