Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets |
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Authors: | Naiqi Wu MengChu Zhou |
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Affiliation: | (1) Department of Mechatronics Engineering, Guangdong University of Technology, Guangzhou, 510090, People’s Republic of China;(2) Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ 07102-1982, USA |
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Abstract: | This paper addresses the problem of real-time deadlock-free scheduling for a semiconductor track system. The system is required to process wafers continuously, cassette by cassette. The process is not necessarily a repeated one. In addition, the system is deadlock-prone and its modules are failure-prone. Thus, real-time scheduling approaches are required to achieve high-performance. The problem can be solved in a hierarchical way. A deadlock avoidance policy is developed for the system as a lower-layer controller. With the support of the deadlock avoidance policy, heuristic rules are proposed to schedule the system in real-time. An effective modeling tool, colored–timed resource-oriented Petri net, is presented. It is shown that with this model we can schedule a system to achieve satisfactory results in real-time. This method is tolerant to module failures. |
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Keywords: | Colored– timed resource-oriented Petri net Deadlock Deadlock-free scheduling Automated manufacturing systems |
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