| 于二次谐波检测的电容式微惯性器件频率响应测试方法研究 |
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| 引用本文： | 肖定邦,侯占强,谢立强,吴学忠,李圣怡.于二次谐波检测的电容式微惯性器件频率响应测试方法研究[J].传感技术学报,2009,22(1). |
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| 作者姓名： | 肖定邦 侯占强 谢立强 吴学忠 李圣怡 |
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| 作者单位： | 国防科技大学机电工程与自动化学院,长沙,410073 |
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| 基金项目： | 国家自然科学基金，国防科技大学优秀研究生创新资助项目 |
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| 摘 要： | 针对电容式微惯性器件信号微弱、耦合噪声大的特点,提出了一种基于二次谐波检测的频率响应测试方法,详细介绍r该测试方法的基本原理,设计了基于此方法的频率响应测试系统,分析了测试系统中存在的误差,以本实验室研制的电容式微陀螺为测试对象,对该方法和传统的一次谐波检测方法进行了对比,结果表明,该方法能够有效地减小电路中耦合噪声对测试结果的影响,提高频率响应测试精度.
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| 关 键 词： | 二次谐波 频率响应 微惯性器件 微机电系统 |
A Novel Method for Measuring the Frequency Responses of Capacitive Micro-inertial Devices Based on the Second Harmonic Detection |
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| Xiao Dingbang,Hou Zhanqiang,Xie Liqiang,Wu Xuezhong,Li Shengyi.A Novel Method for Measuring the Frequency Responses of Capacitive Micro-inertial Devices Based on the Second Harmonic Detection[J].Journal of Transduction Technology,2009,22(1). |
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| Authors: | Xiao Dingbang Hou Zhanqiang Xie Liqiang Wu Xuezhong Li Shengyi |
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| Affiliation: | National University of Defense Technology |
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| Abstract: | A new frequency response analysis method based on the second harmonic detection for capacitive micro-inertial devices is presented in this paper. The frequency of the excitation force is double of the excitation voltage, so the coupling noise is separated. A frequency response analysis system is designed based on this method, and the frequency responses of a capacitive microgyroscope are analyzed by this system. The results show that the second harmonic detection can get a better result than first harmonic detection. |
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| Keywords: | Second Harmonic Frequency Response Micro-Inertial Devices MEMS |
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