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Study of metal assisted anisotropic chemical etching of silicon for high aspect ratio in crystalline silicon solar cells
Affiliation:1. Department of Energy Science, Sungkyunkwan University, Suwon 440-746, Korea;2. College of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Korea;3. Department of Physics, COMSATS Institute of Information Technology, Lahore, 54000, Pakistan;1. Department of Physics, University College of Science, Osmania University, Saifabad, Hyderabad 500004, India;2. Department of Physics, Osmania University, Hyderabad 500007, India;3. School of Physics, Eternal University, Baru Sahib 173101, Himachal Pradesh, India;1. Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;2. University of Chinese Academy of Sciences, Beijing 100049, China;1. Engineering Research Center of IoT Technology Applications (Ministry of Education), Department of Electronic Engineering, Jiangnan University, Wuxi 214122, China;2. Institute of Microelectronics, Chinese Academy of Sciences, 3# Bei-Tu-Cheng West Road, Beijing 100029, China;1. Department of Energy Science, Sungkyunkwan University, Suwon 440-746, Republic of Korea;2. Department of Physics, COMSATS Institute of Information and Technology, Lahore 54000, Pakistan;3. College of Information and Communication Engineering, Sungkyunkwan University, Suwon 440-746, Republic of Korea;4. Department of Electrical Engineering-SEES, CINVESTAV-IPN, Col San Pedro Zacatenco, D.F., Mexico C.P 07360, Mexico
Abstract:Textured surface is commonly used to enhance the efficiency of silicon solar cells by reducing the overall reflectance and improving the light scattering. In this study, a comparison between isotropic and anisotropic etching methods was investigated. The deep funnel shaped structures with high aspect ratio are proposed for better light trapping with low reflectance in crystalline silicon solar cells. The anisotropic metal assisted chemical etching (MACE) was used to form the funnel shaped structures with various aspect ratios. The funnel shaped structures showed an average reflectance of 14.75% while it was 15.77% for the pillar shaped structures. The average reflectance was further reduced to 9.49% using deep funnel shaped structures with an aspect ratio of 1:1.18. The deep funnel shaped structures with high aspect ratios can be employed for high performance of crystalline silicon solar cells.
Keywords:Aspect ratio  Light scattering  Metal assisted chemical etching  Funnel shaped structure  Silicon solar cell
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