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A new photoimageable platinum conductor |
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| Authors: | Selim Achmatowicz Konrad Kie?basiński El?bieta Zwierkowska Valentinas Baltrušaitis |
| Affiliation: | a Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warsaw, Poland b Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland |
| Abstract: | A new thick-film photoimageable platinum paste has been elaborated. The paste is less sensitive to the visible light. The resolution line/space 20/30 μm is achievable. The application of the elaborated paste to produce heaters is demonstrated. The stability of the heaters has been evaluated. |
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