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Pulsed plasma production for applications in plasma immersion ion implantation and its implications |
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| Authors: | S Mukherjee M Ranjan N Vaghela KS Suraj |
| Affiliation: | a FCIPT, Institute for Plasma Research, Gandhinagar, Gujarat, India b Center of Plasma Physics, Sonapur, Assam, India |
| Abstract: | |
| Keywords: | Pulsed plasma Plasma immersion ion implantation Neutral energy distribution |
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