| 截止频率8.7 THz的平面肖特基势垒二极管 |
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| 引用本文： | 李 倩,安 宁,童小东,王文杰,曾建平,李志强,唐海林,熊永忠. 截止频率8.7 THz的平面肖特基势垒二极管[J]. 太赫兹科学与电子信息学报, 2015, 13(5): 679-683 |
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| 作者姓名： | 李 倩 安 宁 童小东 王文杰 曾建平 李志强 唐海林 熊永忠 |
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| 作者单位： | a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China,a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China and a.Institute of Electronic Engineering；b.Microsystem and Terahertz Research Centre，China Academy of Engineering Physics，Mianyang Sichuan 621999，China |
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| 摘 要： | 肖特基势垒二极管(SBD)具有强非线性效应、速度快及容易系统集成等特点，常用于微波、毫米波及太赫兹波的产生和检测。本文通过电子束光刻等技术制作出肖特基接触直径1 μm的二极管，并对二极管进行了直流测试和射频测试。经过直流测试，二极管的串联电阻为10.2 Ω，零偏结电容为1.76 fF，肖特基结截止频率达到了8.7 THz；相同管子的射频测试串联电阻为15.4 Ω，零偏结电容1.46 fF，肖特基结截止频率也达到了7 THz。
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| 关 键 词： | 太赫兹；肖特基势垒二极管；串联电阻；零偏结电容；截止频率 |
| 收稿时间： | 2014-10-29 |
| 修稿时间： | 2014-11-26 |
Planar Schottky Barrier Diode with cut-off frequency of 8.7 THz |
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| LI Qian,AN Ning,TONG Xiaodong,WANG Wenjie,ZENG Jianping,LI Zhiqiang,TANG Hailin and XIONG Yongzhong. Planar Schottky Barrier Diode with cut-off frequency of 8.7 THz[J]. Journal of Terahertz Science and Electronic Information Technology, 2015, 13(5): 679-683 |
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| Authors: | LI Qian AN Ning TONG Xiaodong WANG Wenjie ZENG Jianping LI Zhiqiang TANG Hailin XIONG Yongzhong |
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