基于HNA溶液腐蚀的微半球谐振陀螺研究进展

基于微电子机械系统(MEMS)加工技术的微半球谐振陀螺在吸收了传统半球陀螺全角测量优势的同时具有体积小，质量轻，成本低以及适合批量化生产的特点。在使用牺牲层法来制备微半球壳层结构的过程中，如何在单晶硅上制作一个表面光滑的、结构整体对称性高的半球型模具对于半球谐振子的性能有决定性的影响。在HNA(氢氟酸、硝酸、醋酸)各向同性腐蚀液制作微半球谐振子模具的原理基础上，介绍基于HNA溶液各向同性腐蚀的微半球谐振陀螺研究进展，指出了各向同性腐蚀工艺目前所面临的主要技术问题，并对此提出了一些可能的解决途径。

Research progress of micro-scale hemispherical resonator gyroscopes based on etching of HNA solution

The micro-scale hemispherical resonator gyroscopes based on Micro-Electro-Mechanical Systems(MEMS) manufacturing technology are characterized by small size, light weight, low cost and suitable for volume production while absorbing the advantages of full-angle measurement of traditional hemispherical resonator gyroscopes. In the process of fabricating hemispherical shell structure by sacrificial layer process, whether the molds of hemispherical resonator on single crystal silicon have smooth surface and structural symmetry has decisive influence on the performance of hemispherical resonator. In this paper, the principle of isotropic etching of HNA(Hydrofluoric, Nitric, Acetic) for making micro-scale hemispherical resonator molds is described. Then the research progress of micro-scale hemispheric resonator gyro based on isotropic etching of HNA solution is introduced. Finally, the main technical problems of isotropic etching process are pointed out, and some possible solutions are put forward.