| Experimental research and analysis of three-finger micro-tweezers |
| |
| 作者姓名： | HUANG Wen-hao XING Hao |
| |
| 作者单位： | Department of Precision Machinery and Precision Instrument，University of Science and Technology of China，HeFei 230027，China |
| |
| 基金项目： | NationalnaturalsciencefoundationofChina(No.50275140，No.50335050) |
| |
| 摘 要： | 1Introduction Withthedevelopmentofmicro electro me chanicalstructure(MEMS),grasping,manipu latingandassemblingofmicroobjectsarequite fascinating.Newtoolsforthesepurposeshave beendevelopedrapidly.However,mostofthese researchesarefocusedontwo fingermicro tweezers1～3].Thestabilityandapplicationof two fingermicro tweezersinmanipulationand assemblyareverylimitedingraspingsphere,co lumnarorcomplicatedmicroobjects4].Inorder tograspparticlesmoresteadily,carbonfibers areusedtocreatethethreefingers…
|
| 关 键 词： | 镊子 MEMS 微电子机械系统 数值模拟 |
| 收稿时间： | 2005-03-16 |
| 修稿时间： | 2005-06-27 |
Experimental research and analysis of three-finger micro-tweezers |
| |
| HUANG Wen-hao,XING Hao.Experimental research and analysis of three-finger micro-tweezers[J].Optics and Precision Engineering,2005,13(5):570-574. |
| |
| Authors: | HUANG Wen-hao XING Hao |
| |
| Affiliation: | Department of Precision Machinery and Precision Instrument,University of Science and Technology of China, HeFei 230027, China |
| |
| Abstract: | A new type of three-finger micro-tweezer driven by electro-static force was developed for stable manipulation and assembly of micro devices. The whole system consists of micro-tweezers and a specially designed high frequency AC power supply. The free end of the fingers closes and opens with the increase and decrease of the voltage. The tweezers can grasp and manipulate micro objects at size from 30～100 μm. A quantitative simulation method based on boundarx element method(BEM) and equation of energy conservation is introduced to analyze the non-linear behaviors of the tweezer closure. The simulation results agree well with the experimental data. |
| |
| Keywords: | three-finger micro-tweezer particulation manipulation simulation |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《光学精密工程》浏览原始摘要信息 |
|
点击此处可从《光学精密工程》下载全文 |
