| 影响ESD荷电器件模型放电电流的关键参数研究 |
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| 引用本文： | 邢洁,王明湘,何健.影响ESD荷电器件模型放电电流的关键参数研究[J].半导体技术,2007,32(4):349-353. |
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| 作者姓名： | 邢洁 王明湘 何健 |
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| 作者单位： | 苏州大学,电子信息学院微电子学系,江苏,苏州,215021;飞索半导体中国有限公司,江苏,苏州,215021;苏州大学,电子信息学院微电子学系,江苏,苏州,215021;飞索半导体中国有限公司,江苏,苏州,215021 |
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| 摘 要： | 静电放电峰值电流是基于荷电器件放电模型的放电测试装置中波形验证的关键指标.针对影响放电峰值电流的几个因素:测试探针长度、直径、形状和充电盘绝缘介电层的厚度,研究了这些参数变化对放电峰值电流的影响规律.根据研究结果可调整相应参数,保证荷电器件放电模型的测试装置符合测试标准.基于LRC放电电路的等效模型,实验结果给出了到满意的定量或定性解释.
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| 关 键 词： | 静电放电 荷电器件放电模型 测试探针 LRC模型 |
| 文章编号： | 1003-353(2007)04-349-05 |
| 修稿时间： | 2006-10-30 |
Investigation of Key Parameters for Discharge Peak-Current in ESD Charge Device Model |
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| XING Jie,WANG Ming-xiang,HE Jian.Investigation of Key Parameters for Discharge Peak-Current in ESD Charge Device Model[J].Semiconductor Technology,2007,32(4):349-353. |
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| Authors: | XING Jie WANG Ming-xiang HE Jian |
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| Affiliation: | 1. Department of Microelectronica, Soochow University, Suzhaou 215021, 2. Spansion China Limited, Suzhou 215021, China |
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| Abstract: | Discharge peak current is one of the most important specifications for ESD CDM test system.Data collection shows that during the verification process,detailed parameters of test configuration(such as diameter,length,pin head shape of pogo pin and thickness of under COM dielectric layer) affect discharge waveforms.Statistical data for each parameter variation were analyzed,and these results were well explained according to an equivalent RLC discharging circuit model.Base on this investigation,repeatable and correlated waveform meeting related standards could be ensured. |
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| Keywords: | electrostatic discharge(ESD) charged device model(CDM) pogo-pin LRC model |
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