Modeling and fabrication of micro tools by pulsed electrochemical machining |
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| Authors: | Ronnie Mathew Murali M. Sundaram |
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| Affiliation: | 1. Research Group Electrochemical and Surface Engineering, Vrije Universiteit Brussel, Pleinlaan 2, 1050 Brussels, Belgium;2. Philips Consumer Lifestyle, IPC PE, Drachten, The Netherlands;1. Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, China;2. State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China;3. School of Instrumentation Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing, 100192, China;1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China;2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing, 210016, China |
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| Abstract: | Accurate and precise micro tools are essential for the micromachining of complex micro features in a wide range of engineering materials including metals and ceramics. Existing micro tool fabrication processes suffer from drawbacks such as surface cracks, residual stress and deformations. Electrochemical machining of micro tools is proposed in this work to overcome these limitations. In this research, a mathematical model has been developed to predict the diameter of the micro tool fabricated. Experimental verification of the model using an in-house built micro electrochemical machining system reveals good correlation with theoretical predictions. Using the procedure described in this paper, very high aspect ratio (280–450) tungsten micro tools have been produced. |
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