等效模型分析微机械薄膜谐振器的力学特性

通过引入折合的概念,将多层微机械谐振悬臂梁等效为单层结构,建立了多层微悬臂梁的弯曲振动方程,结合边界条件求出了微悬臂梁的固有频率。等效概念的引入大大简化了多层微机械谐振器件振动特性的理论分析过程,与传统只考虑绝对占优层的方法相比,等效模型不仅更加精确,而且突出了多层微机械谐振梁中的主要矛盾,为多层微机械谐振式器件的结构优化设计奠定了基础。

Mechanical properties of MEMS film resonator analyzed by equivalent model

The multilayer MEMS resonant microcantilever is equivalent as single layer structures by the equivalent model.Then,the bending vibration equation is built and the intrinsic frequency is got.With the equivalent model,the theoretical analysis becomes much simpler and its precision is higher than the old method in which only the optimum layer is considered.The bisis is provided for designing the optimum structure of the multilayer MEMS resonator.