| A micromechanical bridge-shaped voltage-controlled oscillator |
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| 引用本文： | HAN Jianqiang,ZHU Changchun,ZHAO Hongpo,LIU Junhua,SHAO JunXi''''an Jiaotong University,Xi''''an 710049,China. A micromechanical bridge-shaped voltage-controlled oscillator[J]. 中国科学E辑(英文版), 2004, 47(1): 26-32. DOI: 10.1360/03ye0286 |
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| 作者姓名： | HAN Jianqiang ZHU Changchun ZHAO Hongpo LIU Junhua SHAO JunXi''''an Jiaotong University Xi''''an 710049 China |
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| 作者单位： | HAN Jianqiang，ZHU Changchun，ZHAO Hongpo，LIU Junhua，SHAO JunXi'an Jiaotong University，Xi'an 710049，China |
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| 基金项目： | 国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： | A novel micromechanical bridge-shaped voltage-controlled oscillator with high Q value was fabricated. The core of this kind of oscillators is an electrothermally excited and piezoresistively detected micromechanical bridge resonator. Its resonance frequency can be adjusted by changing the DC voltage applied to the Wheatstone bridge. Theoretical analysis and experimental data show that its resonance frequency is linear with the square of the DC voltage. The linearity is better than 0.16% and the adjustable frequency range excels 17.15%.
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A micromechanical bridge-shaped voltage-controlled oscillator |
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| Han Jianqiang,Zhu Changchun,Zhao Hongpo,Liu Junhua,Shao Jun. A micromechanical bridge-shaped voltage-controlled oscillator[J]. Science in China(Technological Sciences), 2004, 47(1): 26-32. DOI: 10.1360/03ye0286 |
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| Authors: | Han Jianqiang Zhu Changchun Zhao Hongpo Liu Junhua Shao Jun |
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| Affiliation: | Xi'an Jiaotong University, Xi'an 710049, China |
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| Abstract: | A novel micromechanical bridge-shaped voltage-controlled oscillator with high Q value was fabricated. The core of this kind of oscillators is an electrothermally excited and piezoresistively detected micromechanical bridge resonator. Its resonance frequency can be adjusted by changing the DC voltage applied to the Wheatstone bridge. Theoretical analysis and experimental data show that its resonance frequency is linear with the square of the DC voltage. The linearity is better than 0.16% and the adjustable frequency range excels 17.15%. |
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| Keywords: | voltage-controlled oscillator microbridge resonator MEMS. |
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