| Gd磁控溅射不锈钢薄膜生长形貌及附着性能研究 |
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| 引用本文： | 郑小秋,谢世坤,易荣喜,吴卫. Gd磁控溅射不锈钢薄膜生长形貌及附着性能研究[J]. 材料导报, 2011, 25(6): 93-96 |
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| 作者姓名： | 郑小秋 谢世坤 易荣喜 吴卫 |
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| 作者单位： | 井冈山大学工学院;西华大学材料学院; |
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| 基金项目： | 国家863基金资助项目(2002AA324010); 井冈山大学校内资助项目(JZ09023) |
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| 摘 要： | 为探讨磁致冷材料Gd表面溅射保护膜后的附着性能,利用直流磁控溅射技术在Gd基体上镀不锈钢(1Cr18Ni9Ti)薄膜。采用扫描电镜(SEM)?能谱仪?扫描探针显微镜对薄膜进行了表征,并用引拉法测定了薄膜的附着强度。结果表明,不锈钢薄膜溅射初期呈岛状分布;溅射一定时间后薄膜呈层状生长,表面质量好,膜/基界面结合好,附着强度高,在功率密度为966W/cm2、溅射时间为8min时附着强度达到最大值24.7MPa。
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| 关 键 词： | 磁致冷材料 磁控溅射 不锈钢 薄膜 生长形貌 附着强度 |
Study on the Adhesion and Growth Morphologies of Stainless Steel Film on Gd by Magnetron Sputtering |
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| ZHENG Xiaoqiu,XIE Shikun,YI Rongxi,WU Wei. Study on the Adhesion and Growth Morphologies of Stainless Steel Film on Gd by Magnetron Sputtering[J]. Materials Review, 2011, 25(6): 93-96 |
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| Authors: | ZHENG Xiaoqiu XIE Shikun YI Rongxi WU Wei |
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| Affiliation: | ZHENG Xiaoqiu1,XIE Shikun1,YI Rongxi1,WU Wei2 (1 School of Engineering,Jinggangshan University,Ji'an 343009,2 Department of Materials Science and Engineering,Xihua University,Chengdu 610039) |
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| Abstract: | In order to study the adhesion of sputtering protective coating of Gd,Gd substrates were coated with 1Cr18Ni9Ti by means of DC magnetron sputtering technology.The characteristics of the film were investigated by scanning electron microscopy(SEM),EDS,SPM and the adhesive strength of film was tested by tension test.The results show that the films of 1Cr18Ni9Ti present in island-like distribution when the sputtering was initiated and the grains are fibrous.When sputtering for a few minutes,the films are smooth... |
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| Keywords: | refrigerant material magnetron sputtering stainless steel films growth morphologies adhesive strength |
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