| 陶瓷基体表面粗糙度对Ni-Cr薄膜换能元性能的影响 |
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| 引用本文： | 王广海,李国新,焦清介.陶瓷基体表面粗糙度对Ni-Cr薄膜换能元性能的影响[J].兵工学报,2011,32(5):548-553. |
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| 作者姓名： | 王广海 李国新 焦清介 |
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| 作者单位： | (北京理工大学 爆炸科学与技术国家重点实验室， 北京 100081) |
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| 摘 要： | 研究了Al2O3(95%)陶瓷基底的粗糙度对Ni-Cr(80/20)合金薄膜及薄膜换能元性能的影响.利用磁控溅射法在不同粗糙度的基底上制备了Ni-Cr合金薄膜.通过扫描电镜、划痕法、4探针法对薄膜的微观结构、附着性能、电性能进行了研究.根据D-最优化法测定了基底粗糙度不同的薄膜换能元爆发电压、爆发电流.结果表明:随着基...
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| 关 键 词： | 物理化学 Ni-Cr薄膜 磁控溅射 表面粗糙度 电性能 形貌 附着力 基底 |
Effect of Substrate Surface Roughness on the Properties of Ni-Cr Alloy Thin Film Transducer Elements |
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| WANG Guang-hai,LI Guo-xin,JIAO Qing-jie.Effect of Substrate Surface Roughness on the Properties of Ni-Cr Alloy Thin Film Transducer Elements[J].Acta Armamentarii,2011,32(5):548-553. |
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| Authors: | WANG Guang-hai LI Guo-xin JIAO Qing-jie |
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| Affiliation: | (State Key Laboratory of Explosion Science and Technology, Beijing Institute of Technology, Beijing 100081, China) |
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| Abstract: | The effect of aluminum oxide(95%) substrate surface roughness on the properties of Ni-Cr alloy thin film was studied.The Ni-Cr alloy thin films were prepared on the substrates with different roughness by magnetron sputtering.The micro-structure,adhesion properties and electrical properties of the thin films were studied by scanning electron microscopy,scratch method and four-probe method.The burst voltage and burst current of thin film transducer elements with different substrate surface roughness were meas... |
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| Keywords: | physical chemistry Ni-Cr thin film magnetron sputtering surface roughness electrical properties topography adhesion strength substrate |
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