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基于单面阵CCD的三维平移测量系统设计
引用本文:吕勇,王凯,刘力双,弋青锐.基于单面阵CCD的三维平移测量系统设计[J].北京机械工业学院学报,2011(3):29-34.
作者姓名:吕勇  王凯  刘力双  弋青锐
作者单位:北京信息科技大学光电信息与通信工程学院;
基金项目:北京市委组织部优秀人才培养专项项目(2009D005006000004); 北京市属高等学校人才强教计划资助项目(PHR201008432)
摘    要:针对高精度多自由度位移同时测量问题,利用光斑位置变化方法设计了一种基于单面阵(CCD,Charge—Coupled Device)三维平移测量系统。系统采用两路准直(LED,Light—Emitting Diode)光束作为测量基准,由单面阵CCD探测光斑图像,图像经处理后可获得光斑位置信息,根据光斑位置变化推算出被测物体三维平移变化量。在实验室环境下构建了二维实验系统,模拟测量X向和Z向的平移变化,结果表明,X向平移测量精度优于±1μm,Z向平移测量精度优于±2μm。系统具有非接触、体积小、精度高的特点。

关 键 词:平移测量  多自由度  准直光束  LED光源  面阵CCD

Design of 3-D translational motion measurement system based on single area array CCDs
LU Yong,WANG Kai,LIU Li-shuang,YI Qing-rui.Design of 3-D translational motion measurement system based on single area array CCDs[J].Journal of Beijing Institute of Machinery,2011(3):29-34.
Authors:LU Yong  WANG Kai  LIU Li-shuang  YI Qing-rui
Affiliation:Lü Yong,WANG Kai,LIU Li-shuang,YI Qing-rui(School of Photoelectric Information and Telecommunication Engineering,Beijing Information Science and Technology University,Beijing 100101,China)
Abstract:High-accuracy simultaneous measurement of multiple degrees of freedom is widely applied and deeply studied.Using light spot position variation method,a measurement system of 3-D(three dimensions,X,Y and Z direction) translational motion based on single area array Charge-Coupled Device(CCD) is designed.Two collimated Light-Emitting Diode(LED) light beams are used as measuring basis.The light spots are captured by the area array CCD to locate their position.Based on the deviation of the position,3-D translati...
Keywords:translational motion measurement  multiple degrees of freedom  collimated light beam  LED light source  area array CCD  
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