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双波长激光量块干涉仪研制
引用本文:蒋秀兰,祝逸庆,马建敏,傅云霞,蔡明钢,葛爱明,王青,陈磊. 双波长激光量块干涉仪研制[J]. 上海计量测试, 2001, 28(5): 10-12
作者姓名:蒋秀兰  祝逸庆  马建敏  傅云霞  蔡明钢  葛爱明  王青  陈磊
作者单位:1. 上海市计量测试技术研究院,200040
2. 南京理工大学电光学院,210094
摘    要:本文介绍了双波长激光量块干涉仪的工作原理,详细描述了仪器的光学,机械设计以及干涉图象处理和量块中心长度自动判读技术,该干涉仪满足1等量块的测量不确定度要求,目前已用于高等级量块的自动化测量。

关 键 词:量块 干涉图象处理 小数重合法测量原理 自动化测量 双波长激光量块干涉仪

Development of the Laser Interferometer for Gauge Block Measurement with Bouble Wavelengths
Jiang Xiulan Zhu Yiqing Ma Jianmin Fu Yunxia Cai Minggang. Development of the Laser Interferometer for Gauge Block Measurement with Bouble Wavelengths[J]. Shanghai Meassurement and Testing, 2001, 28(5): 10-12
Authors:Jiang Xiulan Zhu Yiqing Ma Jianmin Fu Yunxia Cai Minggang
Affiliation:Jiang Xiulan Zhu Yiqing Ma Jianmin Fu Yunxia Cai Minggang (Shanghai Institute of Measurement and Testing Technology 200040) Ge Aiming Wang Qing Chen Lei (Nanjing University of Science and Technology 210094)
Abstract:This paper introduces the principle of laser interferometer for gauge block measurement with double wavelengths, describes the optical and mechanical design, as well as the technology of the interference image processing and automatic identify of central lengths of gauge blocks. The interferometer achieves the measurement uncertainty for the 1 st grad gauge blocks and has be used to the automatic measurement of the high-grad gauge blocks.
Keywords:gauge blocks  laser interferometer  interference image processing
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