| 压电器件在微位移系统中的应用 |
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| 引用本文： | 赵辉,浦昭邦,刘国栋,杨晓新.压电器件在微位移系统中的应用[J].压电与声光,2000,22(4):244-245,252. |
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| 作者姓名： | 赵辉 浦昭邦 刘国栋 杨晓新 |
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| 作者单位： | 哈尔滨工业大学,自动化测试及控制系,哈尔滨,150001 |
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| 摘 要： | 提出了一种采用压电陶瓷器件实现微位移系统的方法，可在１０μｍ内实现０．０１μｍ的微动分辨力。该方法已成功应用在惯性仪表零件小孔径的亚微米超精测量系统中，达到了满意的效果。
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| 关 键 词： | 微位移系统 电压器件 陶瓷器件 |
The Application of Piezoelectric Part in the Micro-displacement System |
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| ZHAO Hui,PU Zhao-bang,LIU Guo-dong,YANG Xiao-xin.The Application of Piezoelectric Part in the Micro-displacement System[J].Piezoelectrics & Acoustooptics,2000,22(4):244-245,252. |
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| Authors: | ZHAO Hui PU Zhao-bang LIU Guo-dong YANG Xiao-xin |
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| Abstract: | A new method for
micro-displacement system by means piezo electric part was presented in this pape r and
the resolution over 0．01 μm of mic ro-displacement was obtained in the rang e longer
than 10 μm．This method was well used in the ultra-precision diameter me asuring
system of small aperture． |
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| Keywords: | piezoelect ric part measurement micro-displacement control |
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