| THE PREPARATION AND CHARACTERISTICS STUDY OF TiNxOy SPECTRAL SELECTIVE ABSORBING FILM BY MAGNETRON SPUTTERING |
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| 引用本文： | D.Chen H.Shen B.W.Wang H.Q.Wang. THE PREPARATION AND CHARACTERISTICS STUDY OF TiNxOy SPECTRAL SELECTIVE ABSORBING FILM BY MAGNETRON SPUTTERING[J]. 金属学报(英文版), 2005, 18(3): 385-388 |
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| 作者姓名： | D.Chen H.Shen B.W.Wang H.Q.Wang |
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| 作者单位： | [1]MaterialandScienceEngineeringInstitute,SouthChinaUniversityofTechnology,Guangzhou510641,China [2]EnergyEngineeringInstitute,ZhongshanUniversity,Guangzhou510275,China／／GuangzhouInstituteofEnergyConversion,TheChineseAcademyofSciences,Guangzhou510640,China [3]GuangzhouInstituteofEnergyConversion,TheChineseAcademyofSciences,Guangzhou510640,China [4]SchoolofMechanismandAutomobile,ShenyangInstituteofAeronauticalEngineering,Shenyang110034,China |
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| 摘 要： | Spectral selective absorbent film is a crucial factor for the solar heating device. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9% titanium as the target and is copper slice as the substrate. In this article, the optical characteristics and microstructure of TiNxOy thin film were studied. Inputing O2 can decrease the reflection of the visible lights, and double layer film can get good absorption for solar energy.
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| 关 键 词： | 光谱选择吸收薄膜 氮钛氧化学物 磁溅射 生长工艺 |
THE PREPARATION AND CHARACTERISTICS STUDY OF TiNxOy SPECTRAL SELECTIVE ABSORBING FILM BY MAGNETRON SPUTTERING |
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| D.Chen. THE PREPARATION AND CHARACTERISTICS STUDY OF TiNxOy SPECTRAL SELECTIVE ABSORBING FILM BY MAGNETRON SPUTTERING[J]. Acta Metallurgica Sinica(English Letters), 2005, 18(3): 385-388 |
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| Authors: | D.Chen |
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| Affiliation: | Material and Science Engineering Institute,South China University of Technology,Guangzhou510641,China |
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| Abstract: | Spectral selective absorbent film is a crucial factor for the solar heating devi ce. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as working gas, N2 and O2 as reactive gas, 99.9% titanium as the target and is copper slice as the subs trate. In this article, the optical characteristics and microstructure of TiNxO y thin film were studied. Inputing O2 can decrease the reflection of the visible lights, and double layer film can get good absorption for solar energy. |
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| Keywords: | spectrum selecting absorbent film TiNxOy magnetron sputtering |
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