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Characteristics of MOSFET Prepared on Si/MgO /spl dot/ Al/sub 2/O/sub 3//SiO/sub 2//Si Structure |
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| Abstract: | A new silicon on insulator (SOI) wafer with epitaxial-Si/ epitaxial-MgO/spl dot/Al/sub 2/O/sub 3/ (0.1 /spl mu/m)/SiO/sub 2/(0.5 /spl mu/m)/ |
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