| 高精度电感式传感器测量系统设计 |
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| 引用本文： | 郭键,董萍萍. 高精度电感式传感器测量系统设计[J]. 工具技术, 2010, 44(6): 88-90 |
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| 作者姓名： | 郭键 董萍萍 |
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| 作者单位： | 北京物资学院 |
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| 基金项目： | 北京市属高等学校人才强教计划资助项目，北京物资学院青年基金项目，北京市教育委员会科研基地建设项目 |
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| 摘 要： | 基于对传感器测量系统精度影响因素的分析,利用数字合成、相敏检波、相位预调整技术改善了电感式传感器测量系统的精度,研制了差动式电感传感器。实验表明,利用该技术实现了高精度电感式传感器测量系统的设计,使该系统达到深亚微米测量精度。
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| 关 键 词： | 电感式传感器 数字合成技术 相敏检波 相位预调整 |
Design of High-Precision Inductive Sensors Measurement system |
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| Guo Jian,Dong Pingping. Design of High-Precision Inductive Sensors Measurement system[J]. Tool Engineering(The Magazine for Cutting & Measuring Engineering), 2010, 44(6): 88-90 |
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| Authors: | Guo Jian Dong Pingping |
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| Affiliation: | Associate Professor,School of Informatics,Beijing Wuzi University,Beijing 101149,China |
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| Abstract: | Basing on analyzing the factors of influencing the precision of sensors measurement system,the precision of inductive sensors measurement system is improved by employing digital synthetic technology,phase-sensitive detection and phase pre-adjustment technology.Differential inductance sensor is developed.The experiment result shows that inductive sensors measurement system with deep sub-micron precision can be carried out by using this kind of technology. |
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| Keywords: | inductive sensors digital synthetic technology phase-sensitive detection phase pre-adjustment |
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