| ITO薄膜的生产技术概况及发展趋势探讨 |
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| 引用本文： | 周宏明,易丹青,杨小玲. ITO薄膜的生产技术概况及发展趋势探讨[J]. 表面技术, 2006, 35(1): 1-4 |
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| 作者姓名： | 周宏明 易丹青 杨小玲 |
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| 作者单位： | 中南大学材料科学与工程学院,湖南,长沙,410083;厦门大学化学化工学院化学工程与生物工程系,福建,厦门,361005 |
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| 摘 要： | 综述了铟锡氧化物(ITO)薄膜的生产技术概况及其发展趋势.介绍了ITO薄膜的主要制备技术的制备原理,包括磁控溅射法、溶胶-凝胶法、化学气相沉淀法、喷雾热分解法及真空蒸发法等5种制膜工艺,并对其优缺点进行了分析.指出ITO薄膜生产技术的发展趋势为:1)大力开发溶胶-凝胶工艺;2)进一步深入研究其合成机理与性能;3)拓宽应用领域;4)开发先进的薄膜制备工艺技术.
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| 关 键 词： | 铟锡氧化物薄膜 制膜工艺 溶胶-凝胶法 发展趋势 |
| 文章编号： | 1001-3660（2006）01-0001-04 |
| 收稿时间： | 2005-08-12 |
| 修稿时间： | 2005-08-12 |
Technology Survey and Development Tendency Investigation on ITO Films |
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| ZHOU Hong-ming,YI Dan-qing,YANG Xiao-ling. Technology Survey and Development Tendency Investigation on ITO Films[J]. Surface Technology, 2006, 35(1): 1-4 |
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| Authors: | ZHOU Hong-ming YI Dan-qing YANG Xiao-ling |
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| Affiliation: | 1. School of Materials Science and Engineering, Central South University, Changsha 410083, China; 2. Department of Chemical and Biological Engineering, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 361005, China |
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| Abstract: | The technology survey and development tendency of ITO films were reviewed.The preparation principles of the main production processes of ITO films were introduced,including DCMS,CVD,Sol-gel process,chemical vapor deposition,spray-pyrolysis and vacuum evaporation,and their merits and demerits were analyzed.Based on the analysis results,the development tendency of production technology of ITO thin film are investigated as follows:(1) Developing the sol-gel process strongly;(2) Further studying their synthesis mechanism and properties;(3) Exploiting their application area;(4) Developing advanced preparation technology of thin film. |
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| Keywords: | ITO films Film-making process Sol-gel process Development tendency |
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