Microstructure, domain structures and ferroelectric properties in (Pb0.8,La0.1,Ca0.1)TiO3/Pb(Zr0.2,Ti0.8)O3 bilayered thin film |
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| Authors: | Jiliang Zhu Xiaohong Zhu Huizhong Zeng Meng Jiang Xuhai Li Jianguo Zhu Dingquan Xiao Yanrong Li |
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| Affiliation: | aCollege of Materials Science and Engineering, Sichuan University, Chengdu 610064, China;bCEA, LETI, MINATEC, 17 Rue des Martyrs, F38054 Grenoble Cedex 9, France;cSchool of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China |
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| Abstract: | Ferroelectric (Pb0.8,La0.1,Ca0.1)TiO3/Pb(Zr0.2,Ti0.8)O3 (PLCT/PZT) bilayered thin film was prepared on Pt(111)/Ti/SiO2/Si(100) substrate by RF magnetron sputtering technique. Pure perovskite crystalline phase, determined by X-ray diffraction, was formed in the PLCT/PZT bilayer. The bilayered film exhibited a very dense and smooth surface morphology with a uniform grain size distribution. The ferroelectric domain structures were investigated by a combination of vertical and lateral piezoresponse force microscopy (VPFM and LPFM, respectively). It is demonstrated by both VPFM and LPFM observations that out-of-plane and in-plane lamellar ferroelectric domains coexist in the bilayered thin film. The PLCT/PZT bilayered film possesses good ferroelectric properties with relatively high spontaneous polarization (2Ps = 82 µC/cm2) and remnant polarization (2Pr = 26.2 µC/cm2). |
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| Keywords: | PLCT/PZT bilayered thin film RF magnetron sputtering Microstructure Domain structure Ferroelectric properties |
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