| 用稀土钇提高离子镀TiN膜层与基体结合力的研究 |
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| 引用本文： | 冯正 刘德浚. 用稀土钇提高离子镀TiN膜层与基体结合力的研究[J]. 金属热处理, 1995, 0(2): 20-22 |
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| 作者姓名： | 冯正 刘德浚 |
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| 作者单位： | 南京航空航天大学!南京210016 |
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| 摘 要： | 研究了不同含量稀土钇对离子镀ＴｉＮ膜与基体结合力的影响，结果表明，加入稀土钇后，大大提高ＴｉＮ膜与基体的结合力，并使膜层内ＴｉＮ相增加，此外，稀土钇能明显提高镀膜过程中钛料蒸发率，在相同镀膜内，能使ＴｉＮ膜层加厚。
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| 关 键 词： | 钇 离子镀 结合力 稀土族 氮化钛 薄膜 |
To Enhance the Binding Force between Ion Plating TiN Coating and Substrate by RE-element Y |
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| Feng Zheng, Liu Dejun, Wang Shaogang. To Enhance the Binding Force between Ion Plating TiN Coating and Substrate by RE-element Y[J]. Heat Treatment of Metals, 1995, 0(2): 20-22 |
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| Authors: | Feng Zheng Liu Dejun Wang Shaogang |
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| Affiliation: | Feng Zheng; Liu Dejun; Wang Shaogang |
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| Abstract: | The effect of different element contents of rare earth element Y on the binding force between ion plating TiN coating and substrate was studied. The RE Y added enhances binding force obviously and increases the amount of TiN phase under the coating and the evaporating rate of Ti in ion plating process is also increased.Addition of RE Y increases the thickness of TiN coating in the same ion plating time. |
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| Keywords: | rare earth element Y ion plating binding force |
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