激光直写设备超精密平稳驱动技术的研究

在二元光学激光直写设备中，主轴的速度稳定性是影响光刻精度的主要原因之一。提出采用机电混合滤波器消除电机的轴向振动和径向振动对系统的影响，提高主轴系统瞬时运动的平稳性。利用鉴相器输出的频差与相差和主轴电机的速度对锁相调速系统的结构进行优化。同时，利用神经网络改善锁相环系统的非线性特性，并采用模糊参数自调整方法调节控制器的参数。结果表明使用机电混合滤波器可使主轴的轴向与径向振动小于20nm，采用改进的锁相环控制可大大提高主轴的调速范围，并改善其动态性能。

Smoothness Driving Technology of the Spindle of BOE Direct Laser Writing Device

The velocity stability of spindle is a key factor that affects lithography accuracy in binary optic elements (BOE) direct laser writing device.Using mechanic low pass filter(MLPF) and electric low pass filter to eliminate the effect of the axial and radial vibrations of the motor on the system is proposed,which improves the smoothness and stability of transient motion of the spindle system.The frequency difference and phase difference from the phase detector and the speed signal of the spindle are used to optimize the structure of phase-locked speed-regulating system.The neural network is used to improve the nonlinearity of the phase-locked loop,and the fuzzy self-regulating method is employed to adjust the controller parameters.The results show that the axial and radial vibrations of less than 20 nm are obtained by the mechanic and electric low pass filters and the improved phase-locked loop control could greatly increase the speed regulating range of the spindle and make its dynamic characteristics better.