| Optical Surface Tilt Measurement with Sub-Second Accuracy |
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| 作者姓名： | 孙东松 邓桦 乔立杰 李助朋 蔡喜平 |
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| 作者单位： | Dept.of Applied Physics，Harbin Institute of Technology，Harbin，150001，China |
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| 摘 要： | ＯｐｔｉｃａｌＳｕｒｆａｃｅＴｉｌｔＭｅａｓｕｒｅｍｅｎｔｗｉｔｈＳｕｂ┐ＳｅｃｏｎｄＡｃｃｕｒａｃｙＳＵＮＤｏｎｇｓｏｎｇ（孙东松）ＤＥＮＧＨｕａ（邓桦）ＱＩＡＯＬｉｊｉｅ（乔立杰）ＬＩＺｈｕｐｅｎｇ李助朋ＣＡＩＸｉｐｉｎｇ蔡喜平（Ｄｅｐｔ．ｏｆＡ...
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Optical Surface Tilt Measurement with Sub Second Accuracy |
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| SUN Dongsong\ DENG Hua,QIAO Lijie,LI Zhupeng,CAI Xiping.Optical Surface Tilt Measurement with Sub-Second Accuracy[J].Journal of Harbin Institute of Technology,1997(2). |
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| Authors: | SUN Dongsong\ DENG Hua QIAO Lijie LI Zhupeng CAI Xiping |
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| Abstract: | This paper presents a coherent resolved heterodyne interferometer used for recognition of surfaces of optical systems with resort to a short coherence length light source and a position sensitive detection(PSD), and its special features of surface sensitivity, high resolution and short measuring time. |
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| Keywords: | Heterodyne interferometer position sensitive detector optical surface mesaurement |
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