Continuum based modeling of silicon integrated circuit processing: An object oriented approach

Continuum based integrated circuit process modeling is the dominant tool used to investigate and understand integrated circuit (IC) development. This paper describes the commonly used models for implantation, diffusion, and material growth. In addition, the supporting numerical techniques are described. This paper focuses on the implementation in object oriented code, Florida Object Oriented Process Simulator (FLOOPS). The software architecture is described for implementing models and numerics. A number of process examples are introduced and discussed.