Influence of deposition temperature on ionic conductivity of perovskite (Li0.5 La0.5) TiO3 solid state electrolyte thin film

Thin film microbattery is a promising micropower source for its high energy density and good cell performances, and the application of fast lithium ion conducting solids as electrolytes is thus very important. (Li0.5 La0.5 )TiO3 (LLTO) thin film electrolytes for thin film microbattery were prepared onto Pt/Si substrates using magnetron sputtering. As-deposited LLTO thin films showed amorphous-like phases and when deposition temperature increases the ionic conductivity raises accordingly. The ionic conductivity of LLTO thin film reaches 8. 7 × 10-6 S/cm when the deposition temperature is 400℃, which shows that the LLTO thin films deposited by magnetron sputtering are suitable for application as an electrolyte for thin film microbattery.