基于双原理的热流量传感器的研究

介绍了一种基于测热原理的新型流量传感器 ,它采用加热器对流体加热 ,利用薄膜温度传感器 ,通过测量流体的温度差和热脉冲上升时间 ,实现流量的测量。两种测量方法相结合使得测量范围有了较大的提高 (0 .1～ 15 0mm/s) ,响应时间缩短到了 2ms,并且 ,这种传感器对杂物不敏感。

The studies on a thermal flow sensor based on double principles

A new type of flow sensor which is based on thermal mea surement is introduced.The flow liquid is heated, and its velocity is tested by two membrane sensors through measuring the difference of temperature and the ti me that the thermal pulse rises.Because of the combination of the two methods, the measurement range of the sensor is widened considerably, and its response t ime is shortened to 2?ms. Furthermore, this sensor is insensitive to pollut ion.