Study on the removal process of phosphorus from silicon by electron beam melting |
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| Affiliation: | 1. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;2. Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian 116024, China;1. Fujian Provincial Key Laboratory of Advanced Materials, College of Materials, Xiamen University, Xiamen 361005, China;2. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116023, China;3. Qingdao Longsun Silicon Technology Company Ltd, Qingdao 266200, China;1. Allgemeinmedizinisches Institut, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Erlangen, Deutschland;2. Dekanat der Medizinischen Fakultät, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Erlangen, Deutschland;1. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116023, China;2. Key Laboratory for Solar Energy Photovoltaic System of Liaoning Province, Dalian 116023, China;1. School of Materials Science and Engineering, Dalian University of Technology, Dalian 116024, China;2. TDK Dalian Corporation, Dalian 116024, China;1. College of Materials, Xiamen University, Xiamen, 361005, PR China;2. Department of Materials Science and Engineering, University of Toronto, Toronto, M5S 3E4, Canada |
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| Abstract: | According to the traditional metallurgical theory, the evaporation process of phosphorus and silicon during silicon refining by electron beam melting (EBM) is discussed and a theoretical model is established to obtain the loss rate of silicon, the removal efficiency of phosphorus and the corresponding energy consumption. The results show that phosphorus can be removed from silicon melt efficiently and quickly by EBM. There is a one-to-one correspondence between the loss of silicon and the removal efficiency of phosphorus, indicating that they have obvious effect on each other, whereas the EB power has little influence on the loss rate of silicon. If the EB power is increased from 9 kW to 21 kW, the melting time can be shortened by 68%, the loss of silicon increased by only 0.1% and the energy consumption decreased by 25%. Based on the theoretical and experimental results, a high-power EBM method is considered to be a better way for the removal of phosphorus with high efficiency and low energy consumption under such experiment conditions. |
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