Silica nanofibers based impedance type humidity detector prepared on glass substrate

Impedance type relative humidity detector is fabricated by depositing electrospun silica nanofibers on glass substrate. The silica nanofibers with an average diameter ∼150 nm and length ∼100 μm were used. Thermogravimetric and differential scanning calorimetric analysis confirm that the accurate annealing temperature is 500 °C for complete removal of PVP. Humidity detecting devices were fabricated by defining titanium electrodes on top of the silica nanofibers. The performance of silica nanofibers humidity detectors was tested by AC electrical measurements at 40–90% relative humidity. The response and the recovery times were 5 s and 3 s, respectively, between 40% and 90% relative humidity. Contribution of dipoles, space charge polarization, relaxation of these dipoles and low frequency dispersion phenomenon were observed during impedance measurements.