| SAW氢传感器的研究进展 |
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| 引用本文： | 周俊静,殷晨波,涂善东. SAW氢传感器的研究进展[J]. 传感器与微系统, 2007, 26(3): 1-3 |
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| 作者姓名： | 周俊静 殷晨波 涂善东 |
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| 作者单位： | 1. 南京工业大学,机械与动力工程学院,江苏,南京,210009
2. 卡尔斯鲁厄大学,德国,卡尔斯鲁厄,76128 |
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| 摘 要： | 对声表面波(SAW)氢传感器的研究目前主要集中在改善其敏感性、加快响应速度、增强稳定性以及消除温度的影响。要实现这些目标,一是改善SAW氢传感器的关键部件——敏感薄膜的性能;二是改进传感器的结构。对主要研究机构在这些方面的研究进行了系统的综述,并提出了发展方向。
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| 关 键 词： | 声表面波 氢传感器 钯膜 |
| 文章编号： | 1000-9787（2007）03-0001-03 |
| 收稿时间： | 2006-09-21 |
| 修稿时间： | 2006-09-21 |
Progress of SAW hydrogen sensor |
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| ZHOU Jun-jing,YIN Chen-bo,TU Shan-dong,Daniel Sonnleithner. Progress of SAW hydrogen sensor[J]. Transducer and Microsystem Technology, 2007, 26(3): 1-3 |
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| Authors: | ZHOU Jun-jing YIN Chen-bo TU Shan-dong Daniel Sonnleithner |
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| Affiliation: | 1. School of Mechanical and Power Engineering, Nanjing University of Technology, Nanjing 210009, China; 2. University of Karlsruhe, Karlsruhe 76128, Germany |
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| Abstract: | The research on surface acoustic wave(SAW) hydrogen sensor is mainly focused on its sensitivity,response time,endurance,time stability and how to eliminate the affection of temperature.One method to realize these is to improve the performance of the sensitive film,and the other is to change the structure of the sensor.The progress of the research is overviewed,and the prospect is predicted. |
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| Keywords: | surface acoustic wave(SAW) hydrogen sensor palladium film |
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