PPB级锆基安培型NO气体传感器性能的研究

采用丝网印刷技术制备了以In2O3为敏感电极的锆基安培型三电极NO传感器用以探测10-9级NO气体。用X射线衍射仪（XRD）和扫描电镜（SEM）对该传感器进行了理化分析；通过测量其在不同温度和不同NO浓度的气氛中的伏安特性曲线和时间响应曲线，研究了传感器的电流输出信号和NO浓度的关系以及时间响应特性。实验表明：在350℃~500℃测试温度范围内，极化电压为-60 mV，NO浓度变化为0~900×10-9时传感器响应电流的变化值Δcurrent和NO浓度之间存在较好的线性关系并且传感器在400℃时响应值最大。在被测气体总流量为100 cm3/min时，传感器信号90%的响应和恢复时间分别为18 s和12 s。传感器信号不受CO2浓度变化的影响，传感器的响应信号在测试时间里具有较好短期稳定性，但长期稳定性有待进一步提高。本文还采用阻抗谱分析方法对传感器的响应机理进行了初步的探索。

Characteristics study of the zirconia-based amperometric gas sensors response to the PPB-level concentration of NO

Amperometric NO sensor based on yttria-stabilized zirconia(YSZ)with In2O3sensing electrode was pre?pared by screen-printing technique to detect the ppblevel of NO. The physical characteristics of the sensor were studied by the X-ray diffraction(XRD)and scanning electron microscope(SEM).The sensitivity of the sensor was studied by measuring the current-voltagecurves and response/recovery time characteristics atdifferent NO concentra?tions and temperatures.The results show that,inthe range of 350℃~500℃and with the polarization voltage of-60 mV,there is a good linear relationship between the variation of the current change?currentand NO concentration , whilethe volume fraction of NO changes from 0 to 900 × 10-9.The sensor response best when the temperature is at 400℃. When the total gas flow rate is 100 cm3/min,the response and recovery time of the 90%signal of the sensors are respectively 18 s and 12 s. Sensor signal is not affected by changes in CO2 concentration;the response signal of the sensor has good short-term stability during the test timebutlong-term stability needs to be further improved. The response mechanism of the sensor has been explored by the AC impedance spectrum analysis method.