| 声表面波谐振式力学量传感器的发展与现状 |
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| 引用本文： | 陈明,王玮. 声表面波谐振式力学量传感器的发展与现状[J]. 传感器与微系统, 2000, 19(5): 1-3 |
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| 作者姓名： | 陈明 王玮 |
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| 作者单位： | 西北工业大学,自动控制系,陕西,西安,710072 |
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| 摘 要： | 扼要回顾了国内外在声表面波力学量传感器方面一些重要的成就 ,阐述了声表面波力学量传感器的特点、基本工作原理 ,简单推导了该传感器输入 -输出关系 ,并对声表面波其他传感器作了介绍。
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| 关 键 词： | 声表面波 力学量 传感器 |
| 文章编号： | ： |
Development and current status of SAW resonator mechanical quantity sensors |
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| CHEN Ming,WANG Wei. Development and current status of SAW resonator mechanical quantity sensors[J]. Transducer and Microsystem Technology, 2000, 19(5): 1-3 |
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| Authors: | CHEN Ming WANG Wei |
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| Abstract: | Some important achievements of SAW mechanical quantity sensors at home and overseas are reviewed briefly, the characteristics and basic working principle of SAW mechanical quantity sensors are expounded, in the meantime, the relationship between input and output of the sensor is simply deduced, finally other types of SAW sensors are introduced. |
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| Keywords: | surface acoustic wave (SAW) mechanical quantity sensor |
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