| 集成光栅干涉微位移测量方法 |
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| 引用本文： | 伍康,叶雄英,刘力涛,陈烽,周兆英.集成光栅干涉微位移测量方法[J].纳米技术与精密工程,2009,7(1):56-59. |
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| 作者姓名： | 伍康 叶雄英 刘力涛 陈烽 周兆英 |
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| 作者单位： | 清华大学精密仪器与机械学系,北京,100084;清华大学精密测试技术及仪器国家重点实验室,北京,100084 |
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| 基金项目： | 国家自然科学基金重点项目 |
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| 摘 要： | 介绍了一种新型集成光栅干涉微位移测量方法，设计加工了微位移敏感芯片，并进行了初步的性能测试．敏感芯片利用硅-玻璃键合体硅工艺制作而成，在玻璃上制有金属光栅，光栅上方有由铝梁支撑的可动结构．实验系统由敏感芯片、半导体激光器、光电二极管以及相应的驱动、检测电路组成入射激光照射到光栅上产生衍射光斑，衍射光的光强随可动结构与光栅之间的距离变化，通过测量衍射光强的变化可以得到位移．测试实验结果表明，所制作的集成光栅干涉微位移敏感芯片可实现位移检测，最小可检测的位移约0．2nm．
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| 关 键 词： | 位移测量 干涉法 衍射光栅 微机电系统 |
Interferometric Detection Method for Micro-Displacement Based on Integrated Diffraction Grating |
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| WU Kang,YE Xiong-ying,LIU Li-tao,CHEN Feng,ZHOU Zhao-ying.Interferometric Detection Method for Micro-Displacement Based on Integrated Diffraction Grating[J].Nanotechnology and Precision Engineering,2009,7(1):56-59. |
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| Authors: | WU Kang YE Xiong-ying LIU Li-tao CHEN Feng ZHOU Zhao-ying |
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| Affiliation: | 1. Department of Precision Instruments and Mechanology;Tsinghua University;Beijing 100084;China;2. State Key Laboratory of Precision Measurement Technology and Instruments;China |
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| Abstract: | An inteferometric detection method for micro-displacement based on an integrated diffraction grating was introduced. The micro-displacement sensitive chips were designed and fabricated,and primary experiments were carried out to test the performance of the chip. The sensitive chip is a silicon-on-glass structure. Metal stripes on the glass substrate were formed as an optical diffraction grating. A movable structure suspended by aluminium beams was placed above the grating. The experimental setup consisted o... |
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| Keywords: | displacement measurement interferometry diffraction grating micro electro mechanical system （MEMS） |
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