微米级PZT驱动器尺度相关的自由振动分析

根据修正偶应力理论和哈密顿原理，并结合经典的层合梁理论，推导出具有层合结构、考虑力 电耦合作用的微米级均质、非均质锆钛酸铅(PbZrTiO3，PZT)智能驱动器尺度相关的运动控制方程和固有频率。通过引入的材料内禀特征尺寸参数，成功捕获了微米级PZT智能驱动器的尺寸效应。数值分析显示，不同基体材料对微米级均质、非均质PZT智能驱动器归一化固有频率影响较小；压电层厚度不变，随着基体厚度增加，微米级PZT驱动器尺寸效应逐渐变小；随着结构特征尺寸逐渐增大，尺寸效应逐渐消失。

Analysis of Size dependent Free Vibration of Micro scale PZT Driver

Based on the modified couple stress theory and Hamilton principle, and combining the classical laminated beam theory, the motion control equations and natural frequencies of micro scale homogeneous and heterogeneous PZT intelligent drivers with laminated structure are derived in considering the mechanical electrical coupling effect. By introducing the intrinsic feature size parameters of materials, the size effect of the micro scale PZT drivers is successfully captured. The numerical analysis results show that different substrate materials have little influence on the normalized natural frequency of micro scale homogeneous and heterogeneous PZT intelligent actuators. With the increase of the thickness of substrate layer, the size effect of micro scale PZT drivers decrease gradually as the thickness of the piezoelectric layer does not change. With the increase of feature size of the PZT structure, the size effect gradually disappears.