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The leakage current mechanism of PZT thin films deposited by in-situ sputtering |
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| Authors: | Y. S. Hwang S. H. Paek J. P. Mah |
| Affiliation: | (1) Department of Materials Engineering, Hanyang University, Seoul, Korea;(2) Department of Electronic EnG., Honam University, Kwang-ju, Korea |
| Abstract: | |
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