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Nanowire Mechanical Switch with a Built‐In Diode |
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| Authors: | Jin‐Woo Han Jae‐Hyuk Ahn Min‐Wu Kim Jeong Oen Lee Jun‐Bo Yoon Yang‐Kyu Choi |
| Affiliation: | Department of Electrical Engineering KAIST Guseong‐dong, Yuseong‐gu, Daejeon 305‐701 (Korea) |
| Abstract: | |
| Keywords: | actuation nanoelectromechanical systems nanowires silicon switches |