新型智能隔振复合结构的动态特性研究

针对精密机械的微位移隔振问题，设计了一种以PVDF压电薄膜为作动器和传感器的新型智能隔振复合结构。根据压电方程推导出了层叠式PVDF压电薄膜作动器厚度变形量表达式，建立了该智能复合结构的隔振理论模型，采用LMS自适应控制算法，以Matlab和有限元混合建模分析方式对本智能隔振复合结构的动态特性进行研究。有限元模型的分析结果与Matlab计算数据一致，验证了本新型智能隔振复合结构对微位移隔振的有效性，其结论将为精密仪器、微纳米设备的微位移智能主动隔振奠定理论基础。

Investigation on the dynamic characteristics of the New Smart Vibration Isolation Composite Structure

In order to isolate the vibration for precision instruments, a new smart composite structure is presented in this paper, which is consisting of the PVDF piezoelectric film actuator and sensor. The deformation formula of the multilayer PVDF piezoelectric film actuator along the thickness direction is derived according to piezoelectric equation and the vibration isolation theoretical model of this new smart composite structure is established in detail. By using LMS adaptive control algorithm, vibration isolation dynamic characteristics of the new smart composite structure are simulated with the software of Matlab and ANSYS. The simulation results of ANSYS are in good agreement with those of Matlab， which verifies the validity of the new smart composite structure. This investigation will provide an important theoretical foundation for the micro-displacement active vibration isolation of precision instruments and micro-nano equipment.